Method of cooling induction-heated vapor deposition apparatus an

Details Method of cooling induction-heated vapor deposition apparatus an Method of cooling induction-heated vapor deposition apparatus an

1980-04-14

1981-10-06

Rubinson, Gene Z.

Electric heating

Metal heating

Of cylinders

219 1049R, 219 1043, 118 501, 427 451, 336 61, H05B 642, C23C 1308

Patent

active

042937558

ABSTRACT:
A method of cooling induction-heated vapor deposition apparatus including an electrically grounded deposition enclosure and a RF induction heating coil having essentially electrically uninsulated turns thereof disposed about the deposition enclosure, comprises the step of spraying deionized liquid having a resistivity of at least 14 megohms-om directly onto the apparatus.

REFERENCES:
patent: Re29016 (1976-10-01), Peacock
patent: 3067278 (1962-12-01), Albright
patent: 3301213 (1967-01-01), Grochowski et al.
patent: 3384162 (1968-05-01), Chan
patent: 3551115 (1970-12-01), Jamieson et al.
patent: 3705967 (1972-12-01), Bobart et al.

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