Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2008-03-20
2010-12-07
DeCady, Albert (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S037000, C700S042000, C700S120000, C700S300000, C219S121580
Reexamination Certificate
active
07848840
ABSTRACT:
Methods and systems for adaptively controlling process parameters in semiconductor manufacturing equipment. An embodiment provides for gain scheduling of PID controllers across recipe steps. One embodiment provides a method for controlling a chuck temperature during a semiconductor manufacturing process, the method employing a first set of proportional-integral-derivative (PID) values in a PID controller to control the chuck temperature at a first setpoint in a first step of a process recipe and employing a second set of PID values in the PID controller to control the chuck temperature at a second setpoint, different than the first setpoint, in a second step of the process recipe. The methods and systems provide reduced controller response times where process parameter setpoint between steps of a process recipe span a wide range.
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Brodie Derek
Dao Ritchie
Nguyen Duy D
Olszewski Scott
Zhang Chunlei
Applied Materials Inc.
Blakely & Sokoloff, Taylor & Zafman
DeCady Albert
Lopez Olvin
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