Data processing: measuring – calibrating – or testing – Calibration or correction system – Sensor or transducer
Reexamination Certificate
2007-02-27
2007-02-27
Barlow, John (Department: 2863)
Data processing: measuring, calibrating, or testing
Calibration or correction system
Sensor or transducer
C702S085000, C702S116000, C073S001010, C073S001880, C073S001340, C438S016000, C438S017000, C324S225000
Reexamination Certificate
active
11196351
ABSTRACT:
A method of compensating sensor data and a method of evaluating an interlock of an interlock system, in which an allowable variation between sensors varying depending on a driving time for a set of equipment, an RF time, the number of wafers, etc. is minimized, thereby enhancing detection reliability of a defective wafer.
REFERENCES:
patent: 5978743 (1999-11-01), Kiyono
patent: 6486661 (2002-11-01), Chia et al.
patent: 6577976 (2003-06-01), Hoff et al.
patent: 6712265 (2004-03-01), Kuo et al.
patent: 6850859 (2005-02-01), Schuh
patent: 1999-74696 (1999-10-01), None
patent: 2004-14072 (2004-02-01), None
patent: 2004-24793 (2004-03-01), None
Doh Seung-Yong
Jang Yoo-seok
Kim Hak-yong
Lee Seung-jun
Park Chang-hun
Barlow John
Samsung Electronics Co,. Ltd.
Stanzione & Kim LLP
Vo Hien
LandOfFree
Method of compensating sensor data and evaluating an... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of compensating sensor data and evaluating an..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of compensating sensor data and evaluating an... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3894502