Method of compensating sensor data and evaluating an...

Data processing: measuring – calibrating – or testing – Calibration or correction system – Sensor or transducer

Reexamination Certificate

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Details

C702S085000, C702S116000, C073S001010, C073S001880, C073S001340, C438S016000, C438S017000, C324S225000

Reexamination Certificate

active

11196351

ABSTRACT:
A method of compensating sensor data and a method of evaluating an interlock of an interlock system, in which an allowable variation between sensors varying depending on a driving time for a set of equipment, an RF time, the number of wafers, etc. is minimized, thereby enhancing detection reliability of a defective wafer.

REFERENCES:
patent: 5978743 (1999-11-01), Kiyono
patent: 6486661 (2002-11-01), Chia et al.
patent: 6577976 (2003-06-01), Hoff et al.
patent: 6712265 (2004-03-01), Kuo et al.
patent: 6850859 (2005-02-01), Schuh
patent: 1999-74696 (1999-10-01), None
patent: 2004-14072 (2004-02-01), None
patent: 2004-24793 (2004-03-01), None

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