Method of coating edges with diamond-like carbon

Details Method of coating edges with diamond-like carbon Method of coating edges with diamond-like carbon

1997-06-18

2000-06-20

King, Roy V.

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

4272497, 427122, 427902, 427904, B05D 306, C23C 1626

Patent

active

060775726

ABSTRACT:
A method of creating a diamond-like carbon film on a substrate, including the steps of exposing the substrate to a hydrocarbon gas environment and generating plasma in the environment of an electron density greater than approximately 5.times.10.sup.10 per cm.sup.3 and a sheath thickness less than about 2 mm under conditions of high ion flux and controlled, low energy ion bombardment.

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