Method of cleaning a substrate by scrubbing

Details Method of cleaning a substrate by scrubbing Method of cleaning a substrate by scrubbing

1997-02-10

1999-03-16

Alexander, Lyle A.

Cleaning and liquid contact with solids

Processes

Using solid work treating agents

134 7, 134 32, 134 33, B08B 704

Patent

active

058824260

ABSTRACT:
The present invention provides a cleaning method in which an object to be cleaned is held such that a surface of the object to be cleaned faces a cleaning body and the object to be cleaned and the cleaning body are moved relative to each other in a state where the cleaning body is in contact with the surface to the object to be cleaned, thereby cleaning the surface of the object to be cleaned, wherein a contact pressure of the cleaning body to the surface of the object to be cleaned is set at most 20 gf/cm.sup.2, when the surface is cleaned.

REFERENCES:
patent: 4382308 (1983-05-01), Curcio
patent: 4476601 (1984-10-01), Oka
patent: 5144711 (1992-09-01), Gill, Jr.
patent: 5282289 (1994-02-01), Hasegawa
patent: 5351360 (1994-10-01), Suzuki
patent: 5375291 (1994-12-01), Tateyama
patent: 5421056 (1995-06-01), Tateyama
patent: 5475889 (1995-12-01), Thrasher
patent: 5485644 (1996-01-01), Shinbara
patent: 5498294 (1996-03-01), Matsushita et al.
patent: 5551986 (1996-09-01), Jain

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