Method of chemically polishing fused quartz

Details Method of chemically polishing fused quartz Method of chemically polishing fused quartz

1986-10-20

1988-10-04

Terapane, John F.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156637, 156663, 156903, 252 793, 65 31, C03C 1500

Patent

active

H00005320

ABSTRACT:
Fused Quartz is chemically polished by lapping the fused quartz surface to bout 3 microns, thoroughly cleaning the lapped fused quartz, treating the lapped fused quartz with an etchant at high pressure in a high pressure vessel while agitating to circulate the etchant and maintaining a uniform temperature throughout the etchant, cooling the vessel, removing the fused quartz, rinsing thoroughly with water and spinning dry.

REFERENCES:
patent: 4099950 (1978-07-01), Pecoraro
patent: 4274907 (1981-06-01), Vig et al.
patent: 4555304 (1985-11-01), Salzle

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