Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Patent
1992-01-10
1994-06-14
Beck, Shrive
Coating processes
Direct application of electrical, magnetic, wave, or...
Plasma
427576, 427597, 4272481, 427337, C23C 1634, C23C 1650, B05D 306
Patent
active
053208781
ABSTRACT:
Polymeric cyanoborane is volatilized, decomposed by thermal or microwave plasma energy, and deposited on a substrate as an amorphous film containing boron, nitrogen and carbon. Residual carbon present in the film is removed by ammonia treatment at an increased temperature, producing an adherent, essentially stoichiometric boron nitride film.
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Maya, et al. "Polymeric Cyanoborane, (CNGH.sub.2).sub.n :Single Source for Chemical Vapor Deposition of boron Nitride Films," J. Am. Ceram. Soc., 74,2 406-409 (Feb. 1991).
A. Lipp, et al. "Hexagonal Boron Nitride: Fabrication, Properties and Applications," J. of European Ceram. Soc., 5, (1989), 3-9.
S. P. S. Arya, et al. "Preparation, Properties and Applications of Boron Nitride Thin Films," Thin Solid Films, 157, (1988), 267-282.
Adams Harold W.
Beck Shrive
Chen Bret
Marasco Joseph A.
Martin Marietta Energy Systems Inc.
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