Method of checking pattern and apparatus therefor

Details Method of checking pattern and apparatus therefor Method of checking pattern and apparatus therefor

1988-08-03

1990-09-18

Boudreau, Leo H.

Image analysis

Histogram processing

For setting a threshold

358106, 382 22, G06K 900

Patent

active

049583743

ABSTRACT:
In a method of checking pattern, a pattern of a target is photographed and an image of the check pattern is converted into a check image data which is represented by pixel data and density data. A design data for forming the pattern of the target is also converted into a reference image data corresponding to the check image data. The check and reference image data is processed and converted into check and reference gradient vector data, respectively. The check gradient vector data is compared with the reference gradient vector data in a respective corresponding pheripheral pixel data, and its pheripheral pixel data so that the defect is detected.

REFERENCES:
patent: 4532650 (1985-07-01), Wihl et al.
patent: 4771468 (1988-09-01), Batchelder et al.
patent: 4805123 (1989-02-01), Specht et al.

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