Radiation imagery chemistry: process – composition – or product th – Registration or layout process other than color proofing
Patent
1999-02-05
2000-03-28
Young, Christopher G.
Radiation imagery chemistry: process, composition, or product th
Registration or layout process other than color proofing
430 30, G03F 900
Patent
active
060429763
ABSTRACT:
The invention provides four sub-patterns located at the periphery of the wafer surface at 90-degree intervals. Each of the four sub-patterns is divided into four alignment scales where each alignment scale is yet again subdivided into a multiplicity of alignment marks. This multiplicity of sub-patterns and alignment scales with each scale having a multiplicity of alignment marks results in very accurate and convenient alignment capability.
REFERENCES:
patent: 5545570 (1996-08-01), Chung et al.
patent: 5699282 (1997-12-01), Allen et al.
patent: 5723385 (1998-03-01), Shen et al.
patent: 5824457 (1998-10-01), Liu et al.
Chen Yung-Dar
Chiang Wen-Chong
Hsiue Jung-Hau
Shih Shih-Chang
Ackerman Stephen B.
Saile George O.
Taiwan Semiconductor Manufacturing Company , Ltd.
Young Christopher G.
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