Method of calibrating and using a semiconductor processing...

Details Method of calibrating and using a semiconductor processing... Method of calibrating and using a semiconductor processing...

2005-04-05

2005-04-05

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

Optical pyrometers

C438S007000, C438S016000

Reexamination Certificate

active

06876442

ABSTRACT:
A method is provided wherein a temperature reading error of a pyrometer is avoided. An upper pyrometer is used to detect infrared radiation from a test layer formed on a test substrate under standard processing conditions. The infrared radiation from the test layer has a period having a length which is indicative of growth rate of the layer. The period is generally inversely proportional to the growth rate. The growth rate is directly related to the temperature.

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patent: 6530992 (2003-03-01), Yang et al.
patent: 0 859 406 (1998-08-01), None

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