Method of calibrating an interferometer optics and of...

Details Method of calibrating an interferometer optics and of... Method of calibrating an interferometer optics and of...

2005-01-18

2008-10-14

Chowdhury, Tarifur R (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07436520

ABSTRACT:
A method of calibrating an interferometer apparatus uses a calibrating element having a plurality of structures comprising at least one of projections and indentations formed on a surface of the calibrating element at predetermined positions to generate interference fringes in the interferometer apparatus to be calibrated.

REFERENCES:
patent: 4340306 (1982-07-01), Balasubramanian
patent: 4697927 (1987-10-01), Ono
patent: 4732483 (1988-03-01), Biegen
patent: 5361312 (1994-11-01), Kuchel
patent: 5473434 (1995-12-01), de Groot
patent: 5488477 (1996-01-01), de Groot
patent: 5768150 (1998-06-01), Sonoda et al.
patent: 5777741 (1998-07-01), Deck
patent: 5982490 (1999-11-01), Ichikawa et al.
patent: 6456382 (2002-09-01), Ichihara et al.
patent: 6597460 (2003-07-01), Groot et al.
patent: 7123365 (2006-10-01), Schulte
patent: 2002/0063867 (2002-05-01), Otto
patent: 2002/0080366 (2002-06-01), Nakayama
patent: 2003/0067609 (2003-04-01), Morita
patent: 2003/0067684 (2003-04-01), Kim
patent: 2004/0190002 (2004-09-01), Schulte et al.
patent: 2006/0121257 (2006-06-01), Brintzinger et al.
patent: WO 03/002933 (2003-01-01), None
D. Malacara, “Optical Shop Testing”, 2ndEdition, John Wiley & Sons, Inc., 1992, Chapter 1 to 4, pp. 1 to 172.
W. Press et al., “Numerical Recipes in Pascal”, Cambridge University Press, Cambridge, 1989, pp. 558 to 565.
D. Malacara et al., “Interferogram Analysis for Optical Testing”, Marcel Dekker, Inc., New York, Basel, Hong Kong 1998, pp. 181 to 185.

Affiliated with

Also associated with

Rating

Method of calibrating an interferometer optics and of... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of calibrating an interferometer optics and of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of calibrating an interferometer optics and of... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4002927