Photocopying – Projection printing and copying cameras – Methods
Reexamination Certificate
2007-08-07
2007-08-07
Fuller, Rodney (Department: 2851)
Photocopying
Projection printing and copying cameras
Methods
C355S052000
Reexamination Certificate
active
10845521
ABSTRACT:
In one method of compensating for the distortion of front-to-backside alignment optics, a displacement vector between the estimated position of a substrate mark and the actual position of a substrate mark is calculated. An optical correction array is also calculated by moving a reference substrate by a fixed amount and comparing how far an image of a point on the back side of a reference substrate moves to how far a corresponding point on the front side of the substrate moves. The displacement vector and optical correction array may then be used to accurately calculate the position of further substrates.
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De Vries Alex
Gui Cheng-Qun
Van Buel Henricus Wilhelmus Maria
ASML Netherlands B.V.
Fuller Rodney
Pillsbury Winthrop Shaw & Pittman LLP
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