Method of bonding metals, and method and apparatus for producing

Metal fusion bonding – Process – Metal to nonmetal with separate metallic filler

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228124, 2281802, 228219, 228205, H01L 2170, B23K 120

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active

051882809

ABSTRACT:
A technique for producing a chip mount type package or a TAB package with high reliability, without use of a flux which would cause environmental pollution or would hinder an enhancement of reliability, more particularly pertains to a method of irradiating bonding surfaces, for which a solder is used, and solder bump electrodes of a package with an atomic or ion energy beam, and bonding the bonding surfaces to each other under normal pressure (about 1 atm) in a continuous apparatus.

REFERENCES:
patent: 4379218 (1983-04-01), Grebe et al.
patent: 4558812 (1985-12-01), Bailey et al.
patent: 4865245 (1989-09-01), Schulte et al.
patent: 5000819 (1991-03-01), Pedder et al.
patent: 5090609 (1992-02-01), Nakao et al.

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