Metal fusion bonding – Process – Metal to nonmetal with separate metallic filler
Patent
1991-12-23
1993-02-23
Ramsey, Kenneth J.
Metal fusion bonding
Process
Metal to nonmetal with separate metallic filler
228124, 2281802, 228219, 228205, H01L 2170, B23K 120
Patent
active
051882809
ABSTRACT:
A technique for producing a chip mount type package or a TAB package with high reliability, without use of a flux which would cause environmental pollution or would hinder an enhancement of reliability, more particularly pertains to a method of irradiating bonding surfaces, for which a solder is used, and solder bump electrodes of a package with an atomic or ion energy beam, and bonding the bonding surfaces to each other under normal pressure (about 1 atm) in a continuous apparatus.
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patent: 4865245 (1989-09-01), Schulte et al.
patent: 5000819 (1991-03-01), Pedder et al.
patent: 5090609 (1992-02-01), Nakao et al.
Akasaki Hiroshi
Emoto Yoshiaki
Horino Masaya
Iketani Masayuki
Irie Shouichi
Hitachi , Ltd.
Hitachi VLSI Engineering Corp.
Ramsey Kenneth J.
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