Method of bonding metals, and method and apparatus for producing

Metal fusion bonding – Process – Metal to nonmetal with separate metallic filler

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228 62, 228 47, 228124, 2281802, H01L 2158

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active

050906097

ABSTRACT:
An invention relating to a technique for producing a chip mount type package or a TAB package with high reliability, without use of a flux which would cause environmental pollution or would hinder an enhancement of reliability, and more particularly pertaining to a method of irradiating bonding surfaces, for which a solder is used, and solder bump electrodes of a package with an atomic or ion energy beam and bonding the bonding surfaces to each other under normal pressure (about 1 atm) in a continuous apparatus.

REFERENCES:
patent: 4166563 (1979-09-01), Peyraud et al.
patent: 4245768 (1981-01-01), Sater
patent: 4247034 (1981-01-01), Burkart et al.
Yosetsu Gijyutsu, Jul., 1987, pp. 88-91.

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