Metal fusion bonding – Process – Metal to nonmetal with separate metallic filler
Patent
1990-04-26
1992-02-25
Ramsey, Kenneth J.
Metal fusion bonding
Process
Metal to nonmetal with separate metallic filler
228 62, 228 47, 228124, 2281802, H01L 2158
Patent
active
050906097
ABSTRACT:
An invention relating to a technique for producing a chip mount type package or a TAB package with high reliability, without use of a flux which would cause environmental pollution or would hinder an enhancement of reliability, and more particularly pertaining to a method of irradiating bonding surfaces, for which a solder is used, and solder bump electrodes of a package with an atomic or ion energy beam and bonding the bonding surfaces to each other under normal pressure (about 1 atm) in a continuous apparatus.
REFERENCES:
patent: 4166563 (1979-09-01), Peyraud et al.
patent: 4245768 (1981-01-01), Sater
patent: 4247034 (1981-01-01), Burkart et al.
Yosetsu Gijyutsu, Jul., 1987, pp. 88-91.
Akasaki Hiroshi
Emoto Yoshiaki
Horino Masaya
Iketani Masayuki
Irie Shouichi
Hitachi , Ltd.
Hitachi VLSI Engineering Corp.
Ramsey Kenneth J.
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