Method of beam centering

Details Method of beam centering Method of beam centering

1987-08-14

1989-04-11

Fields, Carolyn E.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250311, H01J 37147

Patent

active

048209210

ABSTRACT:
By using, in beam path correction, a three-point adjustment of the beam wobbler, the beam path can be optimized for realizing minimum picture errors in the apparatus. For different lens energizations a picture-shifting correction can simply be carried out dynamically.

REFERENCES:
patent: 4095104 (1978-06-01), LePoole et al.
patent: 4618766 (1986-10-01), van der Mast et al.
patent: 4680469 (1987-07-01), Nomura et al.
patent: 4698503 (1987-10-01), Nomura et al.

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