Method of applying micro-protection in defect analysis

Details Method of applying micro-protection in defect analysis Method of applying micro-protection in defect analysis

2006-10-03

2006-10-03

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Methods

C250S309000

Reexamination Certificate

active

07115865

ABSTRACT:
The present invention discloses a method of applying micro-protection in defect analysis. The method includes providing a substrate having at least one defect thereon, forming the micro-protection on the surface of the defect, confirming the site of the defect, and forming a specimen of the defect by utilizing a focused ion beam microscope.

REFERENCES:
patent: 6723650 (2004-04-01), Chang

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