Method of and preventing focal plane anomalies in the focal...

Details Method of and preventing focal plane anomalies in the focal... Method of and preventing focal plane anomalies in the focal...

2006-06-27

2006-06-27

Perkey, W. B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Distortion introducing or rectifying

C355S055000

Reexamination Certificate

active

07068349

ABSTRACT:
To reduce and prevent local field anomalies created localized thinning of the coating of optical elements in the apparatus. The projection system is flood exposed to an intense beam of radiation for a substantial period of time. As the rate of thinning of the coating decreases with time, a uniform coating results.

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D.L. Spears, High Resolution Pattern Replication Using Soft X-Rays, Feb. 24, 1972, Electronics Letters, vol. 8 No. 4, pp. 102-104.

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