Method of and apparatus for stabilizing shapes of objects, such

Details Method of and apparatus for stabilizing shapes of objects, such Method of and apparatus for stabilizing shapes of objects, such

1994-07-05

1995-02-14

Porta, David P.

X-ray or gamma ray systems or devices

Specific application

Lithography

378 84, 378 35, 2504921, 359846, G21K 502

Patent

active

053902289

ABSTRACT:
A temperature distribution of an object, such as an optical element, onto which radiation energy is irradiated, is measured. The change of the shape of the object is controlled by varying the temperature of a part of the object on the basis of the measured temperature distribution to stabilize the shape of the object. Also, the shape of the object being irradiated is stabilized by causing the same temperature distribution in the object when in the thermally stable condition to be generated in the object while it is being irradiated. If the shapes of masks used to manufacture semiconductor devices are stabilized by using the above methods, highly integrated semiconductor devices can be manufactured.

REFERENCES:
patent: 4852133 (1989-07-01), Ikeda et al.
patent: 4969168 (1990-11-01), Sakamoto et al.
patent: 5004319 (1991-04-01), Smither
patent: 5052033 (1991-09-01), Ikeda et al.
patent: 5063582 (1991-11-01), Mori et al.
patent: 5138643 (1992-08-01), Sakamoto et al.
T. Oversluizen, et al., "Performance of a Directly Water-Cooled Silicon Crystal for Use in High-Power Synchrotron Radiation Applications", Rev. Sci. Instrum. vol. 60, No. 7, pp. 1493-1500 (Jul. 1989).
A. M. Hawryluk, et al., "Reflection Mask Technology for X-ray Projection Lithography", Journal of Vacuum Science & Technology, B7, No. 6, pp. 1702-1704 (Nov./Dec. 1989).
K. Asch, et al., "Method of Keeping a Proximity Printing Mask at a Constant Temperature", IBM Technical Disclosure Bulletin, vol. 26, No. 7A, p. 3261 (Dec. 1983).

Affiliated with

Also associated with

Rating

Method of and apparatus for stabilizing shapes of objects, such does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of and apparatus for stabilizing shapes of objects, such , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of and apparatus for stabilizing shapes of objects, such will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-293629