Method of and apparatus for measuring lifetime of carriers in se

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

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324752, G01R 3126

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active

057605971

ABSTRACT:
In addition to microwave and excitation light, bias light as well is irradiated upon a surface of a semiconductor sample that is passivated using a solution which contains an electrolyte. Irradiation of the bias light increases the quantity of ionic substances that exist in the solution, largely changes a surface potential of the semiconductor sample, and suppresses surface recombination. This makes it possible to measure the lifetime of carriers which exist within the semiconductor sample at a high accuracy, without influenced by surface recombination.

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Horanyi, T.S., Pavelka, T. and Tutto, P., "In situ bulk lifetime measurement on silicon with a chemically passivated surface," Applied Surface Science, vol. 63 (1993) pp. 306-311. Jul. 1992.

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