Method of and apparatus for measuring a level of liquid in a...

Details Method of and apparatus for measuring a level of liquid in a... Method of and apparatus for measuring a level of liquid in a...

2006-03-07

2009-02-10

Williams, Hezron (Department: 2856)

Measuring and testing

Liquid level or depth gauge

C073S299000, C073S292000, C073S30400R

Reexamination Certificate

active

07487676

ABSTRACT:
A method of and apparatus for measuring a level of a liquid stored under pressure in a reservoir ensure that the level is measured precisely even when a carrier gas is bubbled through the liquid. A tube extends in the reservoir such that a lower end of the tube is immersed in the liquid and that the liquid occupies a portion of the tube, and a first gas that is insoluble in the liquid is sealed in the upper portion of the tube. A detecting unit detects changes in density of the insoluble gas as the level of the liquid changes. The apparatus is employed in a deposition apparatus where the liquid is used to produce a source gas for forming a layer on a substrate. A carrier gas, bubbled through the liquid in the reservoir, transports gas produced from the liquid to a process chamber in which the deposition process takes place.

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