Method of and apparatus for independently controlling electric p

Details Method of and apparatus for independently controlling electric p Method of and apparatus for independently controlling electric p

1996-12-19

1999-03-30

Paschall, Mark H.

Electric heating

Metal heating

By arc

21912157, 21912143, 156345, 216 67, 333 173, B23K 1000

Patent

active

058892524

ABSTRACT:
An arrangement and method for matching a load and a power source, such as an r.f. power source for a vacuum plasma processing chamber, includes a match network coupled between the power source and the load. The match network has at least two controllably variable electrical characteristics. A sensor is provided that senses at least two parameters of the load. A drive controller responds to the sensed parameters of the load to independently control varying a first one of the electrical characteristics of the match network as a function of only one of the parameters of the load, and a second one of the electrical characteristics of the match network as a function of another one of the parameters of the load. This is done until the power source and the load are in a matched condition. The separation of the match variables to establish a nearly one-to-one correspondence with the load parameters allows independent adjustment of the match variables to provide fast and unambiguous reaching of the matched condition.

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