Method of and apparatus for determining focus of an imaging...

Details Method of and apparatus for determining focus of an imaging... Method of and apparatus for determining focus of an imaging...

2004-11-02

2008-11-18

Chowdhury, Tarifur R. (Department: 2886)

Optics: measuring and testing

Shape or surface configuration

By focus detection

Reexamination Certificate

active

07453581

ABSTRACT:
The focus of an optical system (20) can be determined in a reliable and accurate way by arranging a first and second test object (62,64) having a periodic structure at different sides of the focal plane (66) of the optical system and determining the difference in modulation depth of the images formed on different areas (32,34) of a radiation-sensitive detection system (30).

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