Boots – shoes – and leggings
Patent
1985-12-23
1988-12-13
Lall, Parshotam S.
Boots, shoes, and leggings
364490, 356394, 356237, 382 34, G06K 900
Patent
active
047915862
ABSTRACT:
Method of and apparatus for checking the geometry of multi-layer patterns for IC structures having identical functions, each of the multi-layer patterns including layer patterns arranged in different level layers, wherein electrical image signals corresponding to any two of the multi-layer patterns and having more than two levels are registered with each other and then compared to determine unmatched and matched portions. The comparison of the registered electric image signals may be performed with respect to their amplitude or their gradients. The registration and comparison of two electric image signals may be repeated for all of the layer patterns with the matched portions being no longer subjected to the registration and comparison. A defect detection signal is produced from finally unmatched portions, if any, of the electric image signals having undergone the said registration and comparison.
REFERENCES:
patent: 4347001 (1982-08-01), Levy et al.
patent: 4448532 (1984-05-01), Joseph et al.
patent: 4500202 (1985-02-01), Smyth
patent: 4528634 (1985-07-01), Nakahata et al.
patent: 4532650 (1985-07-01), Wihl et al.
patent: 4559603 (1985-12-01), Yoohikawa
patent: 4570180 (1986-02-01), Baier et al.
patent: 4579455 (1986-04-01), Levy et al.
patent: 4618938 (1986-10-01), Sandland et al.
patent: 4628531 (1986-12-01), Okamoto et al.
patent: 4669123 (1987-05-01), Kobayashi et al.
Tsujiyama et al., "A Highly Reliable Mask Inspection System", IEEE Transactions on Electron Devices, vol. ED-27, No. 7, Jul. 1980, pp. 1284-1290.
Fushimi Satoru
Kubota Hitoshi
Maeda Shunji
Makihira Hiroshi
Nakagawa Yasuo
Hitachi , Ltd.
Lall Parshotam S.
Trans V. N.
LandOfFree
Method of and apparatus for checking geometry of multi-layer pat does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of and apparatus for checking geometry of multi-layer pat, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of and apparatus for checking geometry of multi-layer pat will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2200708