Radiant energy – Ionic separation or analysis – Methods
Reexamination Certificate
2008-08-22
2010-11-30
Vanore, David A (Department: 2881)
Radiant energy
Ionic separation or analysis
Methods
C250S281000, C250S492100, C156S345130, C156S345240, C436S073000, C436S080000, C436S150000, C436S175000, C436S169000, C136S216000, C136S216000, C136S216000, C136S216000
Reexamination Certificate
active
07842916
ABSTRACT:
A method of analyzing ions adsorbed on a surface of a mask for pattern formation of a semiconductor device, and an apparatus using the same are disclosed. The ion analyzing method includes: filling a heating container within a main chamber with a predetermined amount of a solvent; immersing a mask in the solvent-filled heating container; raising an internal pressure of the chamber to a predetermined level by supplying gas into the chamber; separating ions from a surface of the mask by heating the solvent within the heating container at a predetermined temperature for a predetermined period; and analyzing the ions by collecting the solvent.
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Cha Byung-Cheol
Han Sung-Jae
Jeong Hae-Young
Lee Dong-Hun
Muir Patent Consulting, PLLC
Samsung Electronics Co,. Ltd.
Vanore David A
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