Method of and an apparatus for photothermally examining workpiec

Details Method of and an apparatus for photothermally examining workpiec Method of and an apparatus for photothermally examining workpiec

1997-05-29

2000-02-01

Oen, William

Thermal measuring and testing

Leak or flaw detection

With heating or cooling of specimen for test

G01N 2572

Patent

active

060195045

ABSTRACT:
A method of photothermally examining workpiece surfaces, wherein an electromagnetic exciting beam is directed from a measuring unit to a point to be measured on the workpiece surface so as to heat the workpiece surface at that point and, furthermore, the heat radiation emitted from the point to be measured is detected and analyzed, is characterized in that a plurality of selected points to be measured on the workpiece surface are irradiated by at least a partial beam of the exciting beam, and the heat rays issuing from the points to be measured are sensed and subjected to joint analysis.

REFERENCES:
patent: 4551030 (1985-11-01), Luukkala et al.
patent: 4757200 (1988-07-01), Sheperd
patent: 4785185 (1988-11-01), Izatt et al.
patent: 4810088 (1989-03-01), Karning et al.
patent: 5094544 (1992-03-01), Ignatowicz
patent: 5343043 (1994-08-01), Johnson
patent: 5410154 (1995-04-01), Broicher et al.

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