Method of analysis of multiple layer samples

Details Method of analysis of multiple layer samples Method of analysis of multiple layer samples

2007-07-03

2007-07-03

Punnoose, Roy M. (Department: 2886)

Optics: measuring and testing

By polarized light examination

Of surface reflection

C356S128000, C356S630000

Reexamination Certificate

active

11098669

ABSTRACT:
Spectroscopic ellipsometer system(s) mediated methodology for quantifying layer defining parameters in mathematical models of samples which contain a plurality of layers of different materials, at least some of which are absorbing of electromagentic radiation, wherein an acquired data set is not sufficient to allow definite one for one parameter evaluation, and wherein a global fit procedure can be applied to obtain good parameter starting values for use in a parameter evaluating regression procedure.

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J.A. Woollam Co. Inc. 2002 flyer is identified, as it included an article on global fitting to provide starting values for entry to a regression procedure.

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