Radiant energy – Inspection of solids or liquids by charged particles – Methods
Patent
1995-12-20
1997-06-10
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Methods
250282, 250309, H01J 3728, H01J 4900, B01D 5944
Patent
active
056378700
ABSTRACT:
A method of analysis of the distribution of concentration of a substrate including: a step of preparing a plurality of types of sample substrates whose distribution of concentration is to be analyzed; a step of forming on the surfaces of those substrates dummy films of a material different from the substrates or etching the surfaces of the plurality of sample substrates to different depths; in the case of the dummy films; a step of introducing into the sample substrates specific impurities from the direction of the dummy films under substantially identical conditions and then a step of removing the dummy films; a step of performing mass analysis from the sides of the sample substrates; and a step of sequentially calculating the difference in the results of the mass analysis among the sample substrates.
REFERENCES:
patent: 3840743 (1974-10-01), Tamura et al.
patent: 4510387 (1985-04-01), Izumi et al.
patent: 4835115 (1989-05-01), Eklund
patent: 5350919 (1994-09-01), Hirano et al.
patent: 5442174 (1995-08-01), Kataoka et al.
patent: 5502305 (1996-03-01), Kataoka
patent: 5521377 (1996-05-01), Kataoka et al.
Anderson Bruce C.
Sony Corporation
LandOfFree
Method of analysis of distribution of concentration of substrate does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of analysis of distribution of concentration of substrate, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of analysis of distribution of concentration of substrate will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-766777