Radiant energy – Inspection of solids or liquids by charged particles
Patent
1996-01-19
1996-12-31
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
250307, G01B 528, H01J 3726
Patent
active
055896863
ABSTRACT:
A method of and apparatus for producing real-time continual nanometer scale positioning data of the location of sensing probe used with one of a scanning tunneling microscope, an atomic force microscope, or a capacitive or magnetic field-sensing system, for measuring the probe distance and the position relative to an atomic surface or other periodically undulating surface such as a grating or the like moving relatively with respect to the probe, and between which and the surface there exists a sensing field, through rapid oscillating of the probe under the control of sinusoidal voltages, and comparison of the phase and amplitude of the output sinusoidal voltages produced by current in the sensing field to provide positional signals indicative of the direction and distance off the apex of the nearest atom or undulation of the surface; and, where desired, feeding back such positional signals to control the relative movement of the probe and surface.
REFERENCES:
patent: Re33387 (1990-10-01), Binnig
patent: 4343993 (1982-08-01), Binnig et al.
patent: 4823004 (1989-04-01), Kaiser et al.
patent: 5085070 (1992-02-01), Miller et al.
patent: 5406833 (1995-04-01), Gamble et al.
patent: 5507179 (1996-04-01), Gamble et al.
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