Method of amplitude modulated electrostatic polymer...

Details Method of amplitude modulated electrostatic polymer... Method of amplitude modulated electrostatic polymer...

2007-07-10

2007-07-10

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Methods

C250S306000, C073S105000

Reexamination Certificate

active

11040299

ABSTRACT:
A method of amplitude modulated electrostatic polymer nanolithography providing rapid creation of features in a polymer film is disclosed. The nanolithography method of the present invention generates features by mass transport of polymer within an initially uniform, planar film via localized softening of attoliters (102-105nm3) of polymer by Joule heating enabling high data densities upon the surface of the polymer. This localized Joule heating is accomplished by current flow between the cantilever AFM tip and a conductive wafer upon which the layer of polymer is grown or mounted.

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Lyuksyutov et al., Copending Patent Application Subject to an Obligation of Common Assignment “Method of Polymer Nanolithography”, AFD 654, U.S. Appl. No. 10/817,406, filed Mar. 25, 2004.

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