Method of alignment for efficient defect review

Details Method of alignment for efficient defect review Method of alignment for efficient defect review

2007-11-13

2007-11-13

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S491100

Reexamination Certificate

active

10847885

ABSTRACT:
An inspection system includes a SEM visual inspection apparatus for detecting a defect in a semiconductor sample in steps of manufacturing a semiconductor device and a review apparatus for observing, at a high resolution, the defect in the semiconductor sample detected by the SEM visual inspection apparatus. The system has a function of transmitting an alignment dictionary image as one of alignment parameters to be set by the SEM visual inspection apparatus using an inspection recipe to the review apparatus.

REFERENCES:
patent: 6566654 (2003-05-01), Funatsu et al.
patent: 2003/0058444 (2003-03-01), Nara et al.
patent: 2003/0063792 (2003-04-01), Hiroi et al.
patent: P2000-232138 (2000-08-01), None
patent: P2001-127125 (2001-05-01), None

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