Method of aligning a particle-beam-generated pattern to a...

Details Method of aligning a particle-beam-generated pattern to a... Method of aligning a particle-beam-generated pattern to a...

2005-09-23

2009-12-01

Young, Christopher G (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Registration or layout process other than color proofing

C430S030000, C430S296000, C430S942000

Reexamination Certificate

active

07625679

ABSTRACT:
A significant improvement in the alignment of a particle-beam-generated pattern relative to a pre-existing pattern present on a substrate has been accomplished using optical measurement to register the particle beam to the pre-existing pattern. Use of a position fiducial which can be accurately measured by both an optical microscope and a particle beam axis is used to align a pre-existing pattern with a particle-beam-generated pattern during writing of the particle-beam-generated pattern. Registration of the pre-existing pattern to the fiducial and registration of the particle beam axis to the fiducial periodically during production of the particle-beam-generated pattern continually provides an improvement in the overall alignment of the pattern being created to the pre-existing pattern on the substrate. The improved method of alignment can be used to correct for drift, or thermal expansion, or gravitational sag, by way of example.

REFERENCES:
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patent: 6883158 (2005-04-01), Sandstrom et al.
patent: 7388213 (2008-06-01), Sullivan
patent: WO 03/010523 (2001-02-01), None

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