Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1991-02-14
1992-11-24
McCamish, Marion E.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
430311, 430313, 205125, 205159, 205205, 205210, 205211, B05D 300, G03C 500
Patent
active
051660377
ABSTRACT:
Disclosed is a method of fabricating a microelectronic package, especially a microelectronic package having copper circuitization on a dielectric substrate. The method includes the steps of depositing, imaging, developing the photoresist for additive circuitization, and forming a pattern of copper circuitization on the so exposed portions of the package. In order to avoid the formation of deleterious air bubbles on the exposed walls of the imaged and developed resist, the panel is exposed to and wetted by a liquid mist.
REFERENCES:
patent: 4268536 (1981-05-01), Beckenbaugh
patent: 4576685 (1986-03-01), Goffredo
IBM TDB "Method for Through Hole Plating Void Elimination", J. V. Pridans and C. M. Sekora, vol. 21, No. 6, Nov. 1978.
Hitachi, JA Kokai 60-217695, Electroless Plated Printed Circuit Board Manufacture.
Atkinson John M.
Darrow Russell E.
Larnerd John D.
Moore Ronald J.
Duda Kathleen
Flynn John D.
Goldman Richard M.
International Business Machines - Corporation
McCamish Marion E.
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