Method of activating a magnetron generator within a remote plasm

Details Method of activating a magnetron generator within a remote plasm Method of activating a magnetron generator within a remote plasm

1998-02-13

2000-11-07

Grant, William

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

700123, 62480, 102200, 1022022, G06F 1900

Patent

active

06144894&

ABSTRACT:
A method for controlling the output power of the magnetron generator, where the method and apparatus defines an ignition power level that ensures that the magnetron generator provides a minimal level of power that will ignite the plasma and not result in a detrimental impedance mismatch between the magnetron and an applicator of a remote plasma source. When the user of the wafer processing system requests a power level (i.e., a requested power level) that is below this ignition level, the ignition level is used to ignite the plasma and the output power of the magnetron is gradually decreased to the requested power level. The decrease is performed within a predetermined time period.

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patent: 5489362 (1996-02-01), Steinhardt et al.
patent: 5508227 (1996-04-01), Chan et al.
Tai, "A Fundamental Theorem On The Maximum Frequency Of Coherent Oscillations By Robert S. Elliott", IEEE , pp. 802, 1992.
Ayres et al., "Universal Scaling And Initial Energy Distribution For Magneton", IEEE, pp. 180, 1990.

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