Method in connection with the production of a template and...

Details Method in connection with the production of a template and... Method in connection with the production of a template and...

2006-04-04

2006-04-04

Duda, Kathleen (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making named article

C430S330000

Reexamination Certificate

active

07022465

ABSTRACT:
Method in connection with the production of a template, preferably for nanoimprint lithography, which template comprises a flat plate (1) of a first material and a three-dimensional structure (6, 8) of a second material, arranged on the plate, said second material introductory being applied on said plate, in the method, to form the structure. The second material is thereafter fixed to the plate the second material is thereafter fixed to the plate of the first material, by heat treatment (Q) at at least 100° C., for the production of the template. A template is produced by use of the method.

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