Cleaning and liquid contact with solids – Processes – Using sequentially applied treating agents
Patent
1997-01-27
1998-07-21
El-Arini, Zeinab
Cleaning and liquid contact with solids
Processes
Using sequentially applied treating agents
134 251, 134 254, B08B 302
Patent
active
057829900
ABSTRACT:
A washing method for washing objects includes the steps of supplying a washing liquid to a washing vessel and immersing objects in the washing liquid contained in the washing vessel. The method also includes the steps of discharging the liquid at least once from the washing vessel, and starting to apply the washing liquid to the objects when the objects are partly exposed to air as the liquid is discharged from the washing vessel. The washing liquid application is continued during exposure of the objects to the air to prevent the surface of the objects from being dried and stained.
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Anai Noriyuki
Harada Koji
Izumi Sinichiro
Kamikawa Yuuji
Murakami Shinya
El-Arini Zeinab
Tokyo Electron Limited
Tokyo Electron Saga Limited
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