Method for verifying semiconductor device tester

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor

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324754, 714745, 702116, 702123, G01R 3128

Patent

active

061337277

ABSTRACT:
A method for verifying correct operation and functional stability of a tester for semiconductor devices is disclosed. In addition, a method for creating a standard device for use with the tester is also disclosed. In creating a standard device according to the present invention, the tester repeatedly tests a candidate device a predefined number of times and evaluates the test results to determine whether the candidate device is suitable for use as a standard device. In verifying the operation and functional stability of a semiconductor device tester, data generated by repeatedly testing a standard device a predefined number of times are compared to recorded reference data of previous tests of the standard device.

REFERENCES:
patent: 5469394 (1995-11-01), Kumakura et al.
patent: 5654632 (1997-08-01), Ohno
patent: 5940413 (1999-08-01), Kim et al.

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