Data processing: structural design – modeling – simulation – and em – Simulating nonelectrical device or system – Mechanical
Reexamination Certificate
2008-12-12
2011-11-08
Craig, Dwin M (Department: 2123)
Data processing: structural design, modeling, simulation, and em
Simulating nonelectrical device or system
Mechanical
Reexamination Certificate
active
08055489
ABSTRACT:
A method for simulating the effect of trapped charge in an electrostatic chuck on the chuck performance comprises creating a trapped-charge electrical model having a trapped-charge capacitor and a gap-trapped resistor, and coupling the model to a plurality of voltage sources. The trapped-charge capacitor and the gap-trapped resistor may be varied in relation to a plurality of electrostatic chuck physical parameters.
REFERENCES:
patent: 5600578 (1997-02-01), Fang et al.
patent: 6475351 (2002-11-01), Sun et al.
patent: 7685543 (2010-03-01), Tsuji et al.
patent: 2001210706 (2001-08-01), None
patent: 2007505504 (2007-03-01), None
patent: 100708237 (2007-04-01), None
patent: 100749169 (2007-08-01), None
patent: WO-2009078949 (2009-06-01), None
patent: WO-2009078949 (2009-06-01), None
“International Application Serial No. PCT/US2008/013635, Search Report mailed Jul. 27, 2009”, 4 pgs.
“International Application Serial No. PCT/US2008/013635, Written Opinion mailed Jul. 27, 2009”, 3 pgs.
“International Application Serial No. PCT/US2008/013635, International Preliminary Report on Patentability mailed Apr. 14, 2010”, 17 pgs.
Makhratchev Konstantin
McMillin Brian
Craig Dwin M
Lam Research Corporation
Schwegman Lundberg & Woessner, P.A.
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