Coating processes – Coating by vapor – gas – or smoke – Metal coating
Reexamination Certificate
2011-07-26
2011-07-26
Meeks, Timothy H (Department: 1715)
Coating processes
Coating by vapor, gas, or smoke
Metal coating
Reexamination Certificate
active
07985450
ABSTRACT:
A method for the vapor deposition of aluminum films is provided. Such method employs a dialkyl amido dihydroaluminum compound of the formula [H2AlNR1R2]nwherein R1and R2are the same or different alkyl groups having 1 to 3 carbons, and n is an integer of 2 or 3. The aluminum films may be thick or thin and may be aluminum films or may be mixed metal films with aluminum metal. Both CVD and ALD methods may be employed.
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Cho Bo Yearn
Kim Bum Soo
Kim Jin Sik
Kim Jun Young
Kim Young Seop
Burkhart Elizabeth
Frommer & Lawrence & Haug LLP
Meeks Timothy H
Santucci Ronald R
UP Chemical Co., Ltd.
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