Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2005-09-30
2008-08-19
Rutledge, Della J. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S067000, C378S034000, C378S035000, C250S492200
Reexamination Certificate
active
07414700
ABSTRACT:
A method for the removal of a deposition on an optical element of an apparatus including the optical element includes providing an H2containing gas in at least part of the apparatus includes producing hydrogen radicals from H2from the H2containing gas; and bringing the optical element with deposition into contact with at least part of the hydrogen radicals and removing at least part of the deposition. Further, a method for the protection of an optical element of an apparatus including the optical element includes providing a cap layer to the optical element by a deposition process; and during or after use of the apparatus, removing at least part of the cap layer from the optical element in a removal process as described above. The methods can be applied in a lithographic apparatus.
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Banine Vadim Yevgenyevich
Klunder Derk Jan Wilfred
Moors Johannes Hubertus Josephina
Spee Carolus Ida Maria Antonius
Van Herpen Maarten Marinus Johannes Wilhelmus
ASML Netherlands B.V.
Pillsbury Winthrop Shaw & Pittman LLP
Rutledge Della J.
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