Method for the production of nanometer scale step height...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C117S090000, C117S093000, C117S094000, C117S095000, C117S101000

Reexamination Certificate

active

06869480

ABSTRACT:
Methods are disclosed that provide for structures and techniques for the fabrication of ordered arrangements of crystallographically determined nanometer scale steps on single crystal substrates, particularly SiC. The ordered nanometer scale step structures are produced on the top surfaces of mesas by a combination of growth and etching processes. These structures, sometimes referred to herein as artifacts, are to enable step-height calibration, particularly suitable for scanning probe microscopes and profilometers, from less than one nanometer (nm) to greater than 10 nm, with substantially no atomic scale roughness of the plateaus on either side of each step.

REFERENCES:
patent: 5599464 (1997-02-01), Laird
patent: 5915194 (1999-06-01), Powell et al.
patent: 5955654 (1999-09-01), Stover
patent: 5960255 (1999-09-01), Bartha
patent: 5976936 (1999-11-01), Miyajima et al.
patent: 6028008 (2000-02-01), Bayer
patent: 6165874 (2000-12-01), Powell et al.
patent: 6461944 (2002-10-01), Neudeck et al.
patent: 6488771 (2002-12-01), Powell et al.
M. Suzuki, “Standardized Procedure for Calibrating Height Scales in Atomic Force Microscopy on the Order of 1 nm”; Journal of Vacuum Science & Technology A, vol. 14, No. 3, pp 1228-1232 (1996).
Commercially Available Product Descriptions.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Method for the production of nanometer scale step height... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for the production of nanometer scale step height..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for the production of nanometer scale step height... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3443259

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.