Optical: systems and elements – Mirror – Plural mirrors or reflecting surfaces
Reexamination Certificate
2007-07-24
2007-07-24
Phan, James (Department: 2872)
Optical: systems and elements
Mirror
Plural mirrors or reflecting surfaces
C359S855000, C359S865000
Reexamination Certificate
active
10936317
ABSTRACT:
In a method for the production of a facetted mirror24having a plurality of mirror facets12and12′, which have mirror surfaces15and are fitted into reception bores22, 22′ of a support plate16,the mirror facets12, 12′ are made in a first method step. At least one of the mirror facets is fitted into the associated reception bore of the support plate in a second method step, after which the ACTUAL position of the optical axis of at least one mirror surface of an associated mirror facet12, 12′ fitted into the support plate is respectively determined in a third step and compared with a SET position of a predetermined optical axis. Knowing the measured values determined for the at least one mirror facet12, 12′ in the third method step, reprocessing of the mirror facet and/or of the reception bore is subsequently carried out in a further method step if there is an angular deviation between the ACTUAL position and the SET position.
REFERENCES:
patent: 100 30 495 (2002-01-01), None
patent: 0 145 243 (1985-06-01), None
patent: WO 03/050586 (2003-06-01), None
patent: WO 03/067304 (2003-08-01), None
XP-002281181—Ion Beam and Plasma Jet Etching for Optical Component Fabrication(pp. 217-227).
Dornheim Stefan
Heisler Andreas
Seifert Andreas
Weiss Markus
Carl Zeiss SMT AG
GrayRobinson, P.A.
Phan James
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