Method for the preparation of a resin membrane

Details Method for the preparation of a resin membrane Method for the preparation of a resin membrane

1992-07-06

1994-05-03

Lowe, James

Plastic and nonmetallic article shaping or treating: processes

Forming articles by uniting randomly associated particles

Autogenously or by activation of dry coated particles

264216, B29D 701

Patent

active

053085671

ABSTRACT:
A method is proposed for the preparation of a resin membrane suitable for use, for example, as a covering pellicle of a photolithographic mask for patterning of semiconductor devices in the electronic industry. The method comprises the steps of: (a) coating a continuous-length substrate with a solution of the resin by using a roller coater to form a coating layer of the resin solution; (b) drying the coating layer by evaporating the solvent to form a dry resin film on the substrate surface; and (c) peeling the resin film from the surface of the substrate, preferably, in water.

REFERENCES:
patent: 1824337 (1931-09-01), Eichengruen
patent: 2710426 (1955-06-01), Pratzer et al.
patent: 2783894 (1957-03-01), Lovell et al.
patent: 3244789 (1966-04-01), Hofmeier
patent: 3432585 (1969-03-01), Watson
patent: 3524753 (1970-08-01), Sharp
patent: 4895769 (1990-01-01), Land et al.
patent: 4927909 (1990-05-01), Wadhwa

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