Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate
2005-11-08
2005-11-08
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
C250S307000, C250S309000, C250S310000, C250S492200, C250S492210
Reexamination Certificate
active
06963068
ABSTRACT:
The invention provides a method for the manufacture and transmissive irradiation of a sample, comprising the steps of:A Providing a particle-optical system having an internal low-pressure chamber and suitable for the generation of an electron beam and an intersecting ion beam in said chamber;B Providing a specimen within the chamber, carried by a manipulator;C Irradiating the specimen with the ion beam so as to cut a sample from the specimen;D Relatively displacing the sample thus cut to a sample holder than can be manipulated;E Attaching the sample to the sample holder;F Using an electron beam to perform transmissive irradiation of the sample thus attached to the sample holder,characterized in that step F is performed in the low-pressure chamber of the particle-optical system according to step A.
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Asselbergs Peter Emile Stephan Joseph
Tappel Hendrik Gezinus
van Veen Gerard Nicolaas Anne
FEI Company
Scheinberg Michael O.
Smith II Johnnie L
Wells Nikita
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