Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2005-01-04
2005-01-04
Turner, Samuel A. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
06839143
ABSTRACT:
The method is used for the interferometric measurement, in particular for the interferometric absolute measurement, of non-rotationally symmetric wavefront errors on a specimen. The specimen can in this case be brought into a plurality of rotational positions, at least one measurement result being determined in each of the rotational positions. A mathematical evaluation of all measurement results is carried out in conclusion. The measurement is carried out in at least two measurement series (M, N). The measurement results (M1. . . Mm, N1. . . Nn) of each of the measurement series (M, N) are respectively determined in mutually equidistant rotational positions of the specimen. Each of the measurement series (M, N) comprises a specific number m, n of measurements. The individual numbers m, n are natural and mutually coprime numbers.
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patent: 8233552 (1996-09-01), None
Absolute calibration of an optical flat, Fritz, Optical Engineering, Jul./Aug. 1984, pp379-383.*
Absolute flatness testing by the rotation method with optimal measuring-error compensation, Schulz et al, Applied Optics, 7-1992, pp3767-3780.*
Optics Communications 161 (1999) 106-114.
Test optics error removal, Applied optics, vol. 35, No. 7, 1996.
Carl Zeiss SMT AG
Turner Samuel A.
Welsh & Katz Ltd.
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