Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1979-03-21
1980-09-02
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
324158D, G01N 2300
Patent
active
042208548
ABSTRACT:
A method for measuring the potential waveform in an electronic component by means of a scanning electron beam in which the pulse sequence of the primary electron beam contains alternatingly a pulse sequence with a fixed reference phase with respect to the potential pattern of the measuring voltage, and a pulse sequence with a measuring phase which can be shifted over a phase range, with the potential difference between the reference phase and the measuring phases measured, permitting the contactless measurement and a display of the potential pattern on a picture screen.
REFERENCES:
patent: 3531716 (1970-09-01), Tarui et al.
patent: 3549999 (1970-12-01), Norton
patent: 3764898 (1973-10-01), Bohlen et al.
patent: 3956698 (1976-05-01), Malmberg et al.
"Quantitative Voltage Contrast at High Frequencies in The Sem," Balk et al., Scanning Electron Microscopy, 1976, pp. 615-624.
Anderson Bruce C.
Siemens Aktiengesellschaft
LandOfFree
Method for the contactless measurement of the potential waveform does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for the contactless measurement of the potential waveform, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for the contactless measurement of the potential waveform will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1710278