Method for the contactless measurement of the potential waveform

Details Method for the contactless measurement of the potential waveform Method for the contactless measurement of the potential waveform

1979-03-21

1980-09-02

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

324158D, G01N 2300

Patent

active

042208530

ABSTRACT:
A method for the contactless measurement of the potential waveform in an electronic component with a scanning electron microscope in which the electron beam is aimed at a measuring point of the integrated circuit until at least one phase range of the measuring voltage is determined by phase-shifting the pulses of the primary electron beam with respect to the measuring voltage and subsequently, the electron beam jumped to at least one further measuring point where a phase range is determined in the same manner permitting measurement of the potential waveform at different points of the integrated circuit and displayed together on a picture screen.

REFERENCES:
patent: 3531716 (1970-09-01), Tarui et al.
patent: 3549999 (1970-12-01), Norton
patent: 3764898 (1973-10-01), Bohlen et al.
patent: 3956698 (1976-05-01), Malmberg et al.
"Quantitative Voltage Contrast at High Frequencies in the SEM", Balk et al, Scanning Electron Microscopy, 1976, pp. 615-624.

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