Method for supplying and discharging gas to and from semiconduct

Details Method for supplying and discharging gas to and from semiconduct Method for supplying and discharging gas to and from semiconduct

1993-01-21

1994-01-11

Nilson, Robert G.

Fluid handling

Processes

Involving pressure control

137 87, 137571, F04B 3714

Patent

active

052772152

ABSTRACT:
A plurality of airtight chambers are connected through blocking means, which can communicate or shut off the chambers, and at least one of the airtight chambers is used as a processing chamber. One of the adjacent airtight chambers is replaced by a replacement gas, and the replacement gas is supplied to the other of the adjacent airtight chambers. When pressure difference or pressure in the two adjacent airtight chambers is below a predetermined value, the adjacent two airtight chambers are communicated, and pressure in the two airtight chambers is equalized.

REFERENCES:
patent: 4504194 (1985-03-01), Holden

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