Method for steam leaching phosphorus from phosphosilicate glass

Details Method for steam leaching phosphorus from phosphosilicate glass Method for steam leaching phosphorus from phosphosilicate glass

1982-08-16

1983-06-14

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

65 31, 148191, 156657, 156663, B44C 122, C03C 1500, C03C 2506

Patent

active

043881475

ABSTRACT:
A process for reducing the concentration of phosphorus in phosphosilicate glass having particular application in semiconductor fabrication is disclosed. A steam environment is provided, the temperature and pressure of which is adjusted within a predetermined range. The semiconductor device is inserted and maintained within the environment for a given time. The exposure to the steam environment effectively leaches phosphorus from the glass. The device is removed from the steam environment once a desired quantity of phosphorus has been removed.

REFERENCES:
patent: 3810791 (1974-05-01), Kendall
patent: 3811975 (1974-05-01), VanLierop et al.
patent: 3881944 (1975-05-01), Beall et al.

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