Method for scrubbing and cleaning substrate

Details Method for scrubbing and cleaning substrate Method for scrubbing and cleaning substrate

1994-06-29

1996-05-21

El-Arini, Zeinab

Cleaning and liquid contact with solids

Processes

Including application of electrical radiant or wave energy...

134 7, 134 6, 134 26, 134 32, 134 33, B08B 100, B08B 302, B08B 312, B08B 702

Patent

active

055185525

ABSTRACT:
A substrate scrubbing and cleaning method in which a substrate is carried to a rotatable scrubbing arrangement, and both surfaces of the substrate are scrubbed by the rotatable scrubbing arrangement while the substrate is maintained substantially horizontal. In addition, a cleaning solution is applied to both surfaces of the substrate while the substrate is substantially horizontal and is linearly reciprocated.

REFERENCES:
patent: 3479222 (1969-11-01), David et al.
patent: 4109337 (1978-08-01), Hillman et al.
patent: 4178188 (1979-12-01), Dussault et al.
patent: 5092011 (1992-03-01), Gommori et al.

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