Method for sample analysis by sputtering with a particle beam, a

Details Method for sample analysis by sputtering with a particle beam, a Method for sample analysis by sputtering with a particle beam, a

1988-09-09

1990-03-27

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250287, 250309, H01J 3726, H01J 4940

Patent

active

049123254

ABSTRACT:
Disclosed are a method for the analysis of a sample by sputtering, using a particle beam, and a device to implement this method. The method consists in:

REFERENCES:
patent: 4442354 (1984-04-01), Hurst et al.
patent: 4611702 (1987-04-01), Welkie
patent: 4694167 (1987-09-01), Payne et al.

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